Model
GX-1050A
GX-800A
GX-900A
GX1200A
Coating room size
1050 * 1250304 stainless steel.
800 * 1000
900 * 1050
1200 * 1250
Intracavity size of coating
The jig and fixture stand off from the ground 1680mm, which is suitable for the operation height of ergonomics.
The jig and fixture stand off from the ground 1468mm, which is suitable for the operation height of ergonomics.
The jig and fixture stand off from the ground 1510mm, which is suitable for the operation height of ergonomics.

1. the arch type single workpiece disk can satisfy the customer's need for uniformity even more. Rotating 5-30r/min, CVT.
2. the arch type three workpiece disk, the planet public rotation, to a greater extent to meet the needs of customers for production. Rotating 5-30r/min, CVT.
Fixture
For the four piece, the angle of the bracket can be adjusted to meet the customer's need for uniformity. Rotating 5-30r/min, CVT.
The arch type single workpiece disk can meet the customer's need for uniformity even more. Rotating 5-30r/min, CVT.
The arch type single workpiece disk can meet the customer's need for uniformity even more. Rotating 5-30r/min, CVT.
vacuum system
Unit: diffusion pump DIP-12000 (Lai Bao), roots pump ZJY-300, mechanical pump 2X-70, maintain pump 2X-8. The line is 304 stainless steel.
Unit: diffusion pump KT-400 (Zhen Hua), roots pump ZJY-150, mechanical pump 2X-70, maintain pump 2X-8.
Unit: diffusion pump KT-600 (Zhen Hua), roots pump ZJY-600, mechanical pump 2X-70, maintain pump 2X-8.
Unit: diffusion pump KT-800 (Zhen Hua), roots pump ZJY-600, mechanical pump 2X-70, maintain pump 2X-8.
Limit vacuum: better than 4 x 10-4 Pa.
Equipped with anti turbulence device, safety interlock design, manual and automatic selectable.
heating system
The heating method on the heating tube is controlled by PID, and the maximum temperature is 350 C + 1.5 C.
Working gas inflating
Gas mass flow control instrument or manual fine adjustment inflating valve.
Vacuum ionization bombardment
DC 3KV, 06KW rod cathode (used for cleaning the workpiece before coating).
Steam source (selection)

1. TELEMARK-270 degree electron gun (imported), 6KW, high voltage 4KV-10KV adjustable. Location scanning, triangle wave scanning, circular scanning and spiral scanning. The focus of the beam is good, the positioning accuracy is high, and the scanning reproducibility is good.
2. domestic electronic gun (Zhen Hua): 6KW, high voltage 4 KV ~ 8KV adjustable, you can freely choose triangle wave, sine wave, square wave scanning.
3. crucibles: Six cavern, 38 x 20 crucible, or four acupoint (38 x 20 plus one point central arc length 87) arc crucible (for consumption of large low melting point evaporation material) or four hole 48 * 18 crucible.
Ion source (selection)
1. RF (RF) ion source (import).
2. 5KVA Holzer ion source (Zhen Huachan), used in the process of electroplating before electroplating or electroplating, is helpful to improve the refractive index, firmness and adhesion of the film.
Film thickness control system (type selection)
1.MDC-360 crystal controller (import) can store 1~99 layers of automatic coating process, 99 Kinds of program data, accuracy 0.5%+1? Fixed error. 2TELEMARK-880 crystal controller (import): it can store 1~99 layers of automatic coating process and 99 Kinds of program data. Precision 0.5%+1? Fixed error.
3.TELEMARK-820 optical controller (import): using the multi wavelength full spectrum end point analysis technique, the end of the film is determined by the analysis of the transmittance (or reflectivity) curve of the monitoring film 370-870. The control precision is high, and single wave length control, automatic control and manual control can also be adopted. Addition of MACILEOD film system calculation software has a high degree of integration.
4.TELEMARK-820 optical controller with TELEMARK-880 crystal controller can meet the requirements of high accuracy and high repeatability. The full automatic control can be realized with the upper computer.
5. the home-made optical controller (such as 9704 matched monochromator) has adjustable wavelength of 330~870, and the accuracy can reach + 1.5nm.
Hand manipulator
With magnetic base, it can be placed in any position of vacuum chamber door and control cabinet.